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Updated: Mar 25, 2026

Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics
Published on: August 5, 2020
Acoustic Plate Mode sensing in liquids based on free and electrically shorted plate surfaces
V I Anisimkin1, C Caliendo2, E Verona3
1Kotel'nikov Institute of Radio Engineering & Electronics, Russian Academy of Sciences (IRE-RAS), Mokhovay Str., 11/7, 125009 Moscow, Russia.
Abstract:
The sensing behavior to liquids for Acoustic Plate Modes (APMs) propagating along 64°Y, 90°X LiNbO3 plate was investigated vs. two electric boundary conditions. The changes in the APMs phase velocity and attenuation were measured upon exposure to different liquids wetting one of the surfaces of the plate, either free or electrically shorted by a thin conductive Al layer. The experimental data confirm that the presence of a metallic layer covering one of the plate surfaces affects the viscosity and temperature sensitivity of the device. The differences between the sensor response for various liquids, with free or metalized faces, are interpreted in terms of the APM polarization.
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