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Updated: Mar 8, 2026
10:39
Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics
Published on: August 5, 2020
7.5K
Quasi longitudinal Lamb acoustic modes along ZnO/Si/ZnO structures
E Verona1, V I Anisimkin2, V A Osipenko3
1Kotel'nikov Institute of Radio Engineering & Electronics, Russian Academy of Sciences (IRE-RAS), Mokhovay Str., 11/7, 125009 Moscow, Russia; Institute for Photonics and Nanotechnologies, Italian National Research Council (IFN-CNR), via Cineto Romano, 42, I-00156 Roma, Italy.
Ultrasonics
|February 3, 2017
Summary
A novel silicon structure with zinc oxide layers enhances acoustic wave properties. This design boosts electromechanical coupling, making it ideal for developing advanced microwave liquid sensors.
Area of Science:
- Materials Science
- Acoustics
- Nanotechnology
Background:
- Acoustic Lamb waves are crucial for various sensing applications.
- Optimizing wave propagation in layered structures is key to enhancing device performance.
Purpose of the Study:
- To investigate a novel Si/ZnO/Si structure for Quasi Longitudinal (QL) acoustic Lamb wave propagation.
- To analyze the impact of layer thicknesses on wave characteristics and electromechanical coupling.
Main Methods:
- Theoretical calculations of phase velocity, electromechanical coupling, and mechanical displacements.
- Experimental verification of theoretical predictions for specific layer thickness combinations.
Main Results:
- Demonstrated a significant increase in electromechanical coupling in the Si/ZnO/Si structure.
- Observed a substantial decrease in vertical displacement at the ZnO surface.
- Identified specific film/plate thickness combinations yielding optimal properties.
Conclusions:
- The Si/ZnO/Si structure effectively supports QL acoustic Lamb waves.
- The enhanced electromechanical coupling and reduced displacement are promising for sensor applications.
- This structure is attractive for the development of microwave liquid sensors.
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