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Updated: Mar 25, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Measuring vibrational motion in the presence of speckle using off-axis holography
Abstract:
We present a holographic laser vibrometer designed to mitigate the effects of speckle noise when measuring the vibrational motion of a rough object. We show that multiplexing the interferometric measurement across 105 pixels provides a 50 dB reduction in the incoherent noise. Using a high-speed camera, this enables a displacement sensitivity of 50 fm/√Hz with a bandwidth of 12.5 kHz when measuring rough objects, representing a 20 dB improvement compared with a commercially available single-detector-based laser vibrometer. Finally, we show that the holographic vibrometer system is capable of stand-off acoustic sensing by measuring the acoustic-induced vibrations of a piece of paper with sensitivity as low as 10 dB (re 20 μPa). The ability to sensitively and noninvasively measure the vibrations of arbitrary rough surfaces could enable new applications in laser vibrometry.

