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Area of Science:

Optics and Photonics
Microelectromechanical Systems (MEMS)

Background:

Microelectromechanical (MEMS) mirrors offer compact vision capabilities but typically have a limited field-of-view (FOV) under 90°.
Increasing the scanning angle of MEMS mirrors often involves design and fabrication compromises affecting power, size, speed, and stability.

Purpose of the Study:

To develop a technique for enlarging the scanning range of MEMS mirrors while maintaining a small form factor.
To leverage the liquid immersion of MEMS mirrors to achieve an enhanced FOV.

Main Methods:

Immersion of MEMS mirrors in a liquid medium.
Exploitation of the "Snell's window" effect caused by liquid immersion.
Design and optimization of a MEMS mirror for liquid environments.

Main Results:

Achieved an enlarged field-of-view (FOV) of approximately 150°.
Demonstrated the feasibility of liquid-immersed MEMS mirrors for enhanced scanning.
Successfully applied the technology in extreme wide-angle structured light applications.

Conclusions:

Liquid immersion of MEMS mirrors is an effective method to overcome FOV limitations.
The "Snell's window" effect in liquid enables significantly wider scanning angles.
This approach paves the way for new applications requiring ultra-wide-angle MEMS mirror systems.