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Updated: Mar 24, 2026

Non-equilibrium Microwave Plasma for Efficient High Temperature Chemistry
Published on: August 1, 2017
Injection of auxiliary electrons for increasing the plasma density in highly charged and high intensity ion sources
F Odorici1, L Malferrari1, A Montanari1
1INFN-Bologna, Viale B. Pichat, 6/2, 40127 Bologna, Italy.
Abstract:
Different electron guns based on cold- or hot-cathode technologies have been developed since 2009 at INFN for operating within ECR plasma chambers as sources of auxiliary electrons, with the aim of boosting the source performances by means of a higher plasma lifetime and density. Their application to microwave discharge ion sources, where plasma is not confined, has required an improvement of the gun design, in order to "screen" the cathode from the plasma particles. Experimental tests carried out on a plasma reactor show a boost of the plasma density, ranging from 10% to 90% when the electron guns are used, as explained by plasma diffusion models.
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