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Updated: Mar 24, 2026

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Underwater Imaging Using a 1 × 16 CMUT Linear Array.

Rui Zhang1,2, Wendong Zhang3,4, Changde He5,6

  • 1Key Laboratory of Instrumentation Science &amp; Dynamic Measurement, North University of China, Ministry of Education, Taiyuan 030051, China. fly_zr@126.com.

Sensors (Basel, Switzerland)
|March 4, 2016
PubMed
Summary

A new capacitive micro-machined ultrasonic transducer array offers effective underwater imaging. This 700 kHz array demonstrates promising performance for low-frequency acoustic applications.

Keywords:
capacitive micro-machined ultrasonic transducer linear arraysynthetic aperture focusing techniquetransmission performanceunderwater imaging

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Area of Science:

  • Acoustics
  • Materials Science
  • Electrical Engineering

Background:

  • Underwater imaging requires high-resolution acoustic transducers.
  • Low-frequency applications demand specialized transducer designs for optimal performance.

Purpose of the Study:

  • To design, fabricate, and test a novel 1x16 capacitive micro-machined ultrasonic transducer linear array.
  • To evaluate its suitability for low-frequency underwater imaging applications.

Main Methods:

  • Fabrication using Silicon-on-Insulator (Si-SOI) bonding techniques.
  • Testing underwater transmission performance in a water tank.
  • Application of synthetic aperture focusing technique (SAFT) for image reconstruction.

Main Results:

  • The linear array achieved a resonant frequency of 700 kHz.
  • Demonstrated a pressure amplitude of 182 dB (μPa·m/V) at 1 meter.
  • Achieved a -3 dB main beam width of approximately 5 degrees.
  • SAFT improved the resolution of reconstructed underwater images.

Conclusions:

  • The designed capacitive micro-machined ultrasonic transducer linear array is suitable for underwater imaging.
  • The array's performance characteristics are promising for low-frequency acoustic applications.
  • The fabrication technique and imaging method show potential for advancements in underwater acoustics.