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Updated: Mar 24, 2026

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Electrospray Deposition of Uniform Thickness Ge23Sb7S70 and As40S60 Chalcogenide Glass Films
Published on: August 19, 2016
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Application of white light Fresnel diffractometry to film thickness measurement
Applied Optics
|March 15, 2016
Abstract:
In this work we present the theoretical background and experimental procedure to measure the thickness of thin films by analyzing Fresnel diffraction patterns obtained from polychromatic illumination of phase-step samples. As examples of this technique, we measured the thicknesses of thin aluminum layers on glass substrates using three different broad-spectrum light sources. The results are in excellent agreement with independent interferometric measurements within less than 5% relative uncertainties.
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