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Related Concept Videos

Assessing Body Temperature - Oral01:14

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Here are the steps to accurately measure oral temperature using an electronic thermometer:
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Start by practicing proper hand hygiene to prevent the spread of microorganisms.
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Take the thermometer out of the charging unit, switch it on, and wait for the ready sign.
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Assessing Body Temperature - Tympanic membrane01:14

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Microbial biosensors are analytical devices that utilize living microbes to detect specific substances through measurable signals. These devices consist of two main components: biosensing organisms and signal-transducing elements. Biosensing organisms, such as Escherichia coli or Saccharomyces cerevisiae, are typically housed in multiwell plates connected to transducers, enabling rapid, real-time detection of target analytes.Signal Generation MechanismWhen a target analyte—such as...
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Fabrication and Testing of Photonic Thermometers
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Microhotplate Temperature Sensor Calibration and BIST.

M Afridi1, C Montgomery1, E Cooper-Balis2

  • 1National Institute of Standards and Technology, Gaithersburg, MD 20899-0001.

Journal of Research of the National Institute of Standards and Technology
|March 19, 2016
PubMed
Summary
This summary is machine-generated.

A new calibration technique for microhotplate temperature sensors ensures long-term stability for Built-In Self Test (BIST). Microhotplate thermal resistance and thermocouple voltage proved stable, unlike polysilicon heaters, enabling reliable BIST implementation.

Keywords:
BISTcalibrationmicrohotplateplatinum-rhodiumsensorsiliconsubstratetemperaturethermocouple

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Area of Science:

  • Materials Science
  • Electrical Engineering
  • Metrology

Background:

  • Microhotplate temperature sensors are crucial for various applications but require stable calibration.
  • Existing calibration methods can drift over time, especially at high temperatures, limiting long-term reliability.
  • Built-In Self Test (BIST) requires robust and stable sensor calibration for effective functionality.

Purpose of the Study:

  • To develop and validate a novel long-term calibration technique for microhotplate temperature sensors.
  • To assess the stability of microhotplate thermal resistance and integrated thermocouples under thermal stress.
  • To determine the suitability of the proposed calibration method for implementing BIST functionality.

Main Methods:

  • Calibrated an unstable polysilicon microhotplate heater against a stable reference sensor.
  • Subjected the microhotplate to high temperatures (around 400 °C) for extended periods.
  • Repeated calibration and measurement cycles over 80 days, monitoring thermal resistance, thermocouple voltage, and heater drift.
  • Evaluated the stability of aluminum- and polysilicon-based sensors for substrate temperature measurement.

Main Results:

  • The polysilicon heater calibration drifted significantly over the 80-day test period.
  • Microhotplate thermal resistance and platinum-rhodium thermocouple voltage remained stable within ±1 °C.
  • The combination of microhotplate thermal resistance or thermocouple with the heater sensor enables stable temperature sensing for BIST.
  • Aluminum and polysilicon sensors are suitable for substrate temperature if kept below 220 °C.

Conclusions:

  • A novel microhotplate temperature sensor calibration technique using thermal resistance or thermocouple is effective for long-term BIST.
  • Integrated thermal resistance and thermocouples offer superior stability compared to polysilicon heaters at elevated temperatures.
  • The proposed method enhances the reliability and reduces recalibration needs for microhotplate-based systems.