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Updated: Mar 24, 2026

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Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
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Correction: Fabrication of poly-crystalline Si-based Mie resonators via amorphous Si on SiO2 dewetting
Meher Naffouti1, Thomas David2, Abdelmalek Benkouider2
1CNRS, Aix-Marseille Université, Centrale Marseille, IM2NP, UMR 7334, Campus de St. Jérôme, 13397 Marseille, France. marco.abbarchi@im2np.fr and Laboratoire de Micro-Optoélectroniques et Nanostructures, Faculté des Sciences de Monastir, Université de Monastir, Monastir 5019, Tunisia.
Nanoscale
|March 19, 2016
Abstract:
Correction for 'Fabrication of poly-crystalline Si-based Mie resonators via amorphous Si on SiO2 dewetting' by Meher Naffouti, et al., Nanoscale, 2016, 8, 2844-2849.

