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A Differential Monolithically Integrated Inductive Linear Displacement Measurement Microsystem.

Matija Podhraški¹, Janez Trontelj²

¹Letrika Lab d.o.o., Polje 15, Šempeter pri Gorici 5290, Slovenia. matija.podhraski@si.mahle.com.

Sensors (Basel, Switzerland)

|March 22, 2016

Summary

This study presents an integrated inductive linear displacement measurement microsystem on a chip. This novel system offers a compact, easy-to-use alternative to traditional position encoders, achieving 20 µm resolution.

Keywords:

ASIC CMOS analog front-end displacement measurement eddy-current sensor inductive sensor microcoil microtransformer position measurement

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Area of Science:

Microelectromechanical Systems (MEMS)
Integrated Circuit Design
Sensor Technology

Background:

Conventional position encoders often require external components or specific environmental conditions (e.g., light or magnetic fields).
There is a need for compact, fully integrated, and easily deployable linear displacement measurement solutions.

Purpose of the Study:

To develop and characterize a monolithic inductive linear displacement measurement microsystem.
To demonstrate the potential of this integrated system to replace existing position encoder technologies.

Main Methods:

Fabrication of an Application-Specific Integrated Circuit (ASIC) using a 350-nm CMOS process, incorporating microtransformers and analog front-end electronics.
Utilizing a differential measurement principle where displacement modulates an AC excitation signal (MHz range).
Employing homodyne mixing for demodulation, yielding quadrature DC signals for position determination.

Main Results:

Successful monolithic integration of sensing elements and signal processing.
Demonstrated linear resolution of 20 µm at 4 MHz operating frequency.
Achieved sensitivities of 0.71 V/mm (steel scale) and 0.99 V/mm (copper scale).

Conclusions:

The developed inductive microsystem offers a fully integrated, fabrication-friendly solution for linear displacement measurement.
The system's independence from external light or magnetic sources enhances its applicability.
This technology shows promise as a viable substitute for conventional position encoders in various applications.