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This study introduces a robust terahertz (THz) receiver with an improved titanium micro-bolometer, extending sensor lifetime and enhancing sensitivity measurement for production testing.

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Area of Science:

  • Terahertz (THz) technology
  • Micro-bolometer sensor development
  • Antenna-coupled devices

Background:

  • Terahertz receivers are crucial for various applications.
  • Titanium micro-bolometers offer potential for THz detection.
  • Sensor robustness and lifetime are key challenges in micro-bolometer design.

Purpose of the Study:

  • To present a novel antenna-coupled titanium micro-bolometer for THz reception.
  • To investigate the impact of geometrical design on sensor robustness and lifetime.
  • To introduce and validate a new algorithm for micro-bolometer sensitivity measurement suitable for production testing.

Main Methods:

  • Development of a new geometrical design for the titanium micro-bolometer.
  • Systematic study of sensor lifetime under various biasing currents.
  • Verification of sensor lifetime through extensive testing exceeding 1000 operating hours.
  • Presentation and application of a novel sensitivity measurement algorithm.
  • Investigation of a "sensitivity boosting" feature and its effects.

Main Results:

  • The new geometrical design significantly improves micro-bolometer robustness and extends operational lifetime.
  • Sensor lifetime was successfully verified over 1000 operating hours across different biasing currents.
  • A new algorithm for micro-bolometer sensitivity measurement was developed and validated.
  • The "sensitivity boosting" feature demonstrated an influence on both sensitivity and lifetime.

Conclusions:

  • The enhanced titanium micro-bolometer design offers improved robustness and extended lifetime for THz receivers.
  • The new sensitivity measurement algorithm is suitable for automated manufacturing and testing (ATM) of micro-bolometers.
  • The findings contribute to the development of more reliable and efficient THz sensing technologies.