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MOS Capacitor

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A Metal-Oxide-Semiconductor (MOS) capacitor is a fundamental structure used extensively in semiconductor device technology, particularly in the fabrication of integrated circuits and MOSFETs (metal-oxide-semiconductor field-effect transistors). The MOS capacitor consists of three layers: a metal gate, a dielectric oxide, and a semiconductor substrate.
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Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators

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A Novel Digital Closed Loop MEMS Accelerometer Utilizing a Charge Pump.

Yixing Chu¹, Jingxin Dong², Baoyong Chi³

¹Department of Precision Instrument, Tsinghua University, Beijing 100084, China. chuyx11@mails.tsinghua.edu.cn.

Sensors (Basel, Switzerland)

|March 22, 2016

Summary

This summary is machine-generated.

This study introduces a novel digital closed-loop microelectromechanical system (MEMS) accelerometer. It simplifies design using a charge pump system for integrated circuits, enhancing performance and stability.

Keywords:

MEMS accelerometer charge pump closed loop sigma delta modulator

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Area of Science:

Electrical Engineering
Mechanical Engineering
Materials Science

Background:

Microelectromechanical systems (MEMS) accelerometers are crucial for motion sensing.
Existing designs often face challenges with complex timing and power supply requirements.
Integration of MEMS accelerometers with interface circuits on a single die is highly desirable for miniaturization and cost reduction.

Purpose of the Study:

To present a novel digital closed-loop MEMS accelerometer architecture.
To demonstrate the feasibility of integrating MEMS accelerometers and interface circuits on a single die.
To overcome the limitations of complex timing diagrams and power supplies in previous designs.

Main Methods:

Fabrication of a charge pump system with adjustable output voltage using a 2P4M 0.35 µm complementary metal-oxide semiconductor (CMOS) process.
Utilizing the charge pump to boost the output bitstream of a sigma-delta modulator.
Applying boosted signals to feedback comb fingers to generate electrostatic forces for closed-loop operation.

Main Results:

Successful implementation of a digital closed-loop MEMS accelerometer.
Experimental results show excellent agreement with theoretical predictions.
Achieved nonlinearity within ±1 g is 0.222%.
Demonstrated long-term stability of approximately 774 µg.

Conclusions:

The developed charge pump system effectively simplifies MEMS accelerometer design and integration.
The novel architecture enables large-scale integration of MEMS accelerometers and interface circuits on a single die.
The demonstrated performance metrics indicate a significant advancement in MEMS accelerometer technology.