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Patterning of sub-50 nm perpendicular CoFeB/MgO-based magnetic tunnel junctions

Larysa Tryputen1, Kun-Hua Tu, Stephan K Piotrowski

  • 1Department of Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139, USA.

Nanotechnology
|March 24, 2016
PubMed

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