An Unconventional Inchworm Actuator Based on PZT/ERFs Control Technology

Area of Science:

• Mechanical Engineering
• Materials Science
• Robotics

Background:

• Precision positioning systems are crucial in various scientific and industrial applications.
• Existing actuators often face limitations in displacement resolution, driving force, or velocity.
• Piezoelectric (PZT) actuation and electrorheological fluids (ERFs) offer potential for advanced actuator designs.

Purpose of the Study:

• To develop and characterize an unconventional inchworm actuator for high-precision positioning.
• To integrate PZT actuation with ERF control technology for enhanced performance.
• To address the challenge of small PZT deformation through innovative actuation unit design.

Main Methods:

• Design and fabrication of a novel inchworm actuator prototype.
• Development of an actuation unit integrating diaphragm and piston-type pump chamber volume changes.
• Creation of a composite ERF valve with a series-parallel plate structure to enhance static shear yield strength.
• Systematic experimental testing to evaluate performance metrics.

Main Results:

• Achieved a displacement resolution of 0.038 μm.
• Demonstrated a maximum driving force of 42 N and a maximum velocity of 14.8 mm/s.
• Identified an optimal working frequency of 120 Hz for maximum driving velocity.

Conclusions:

• The developed inchworm actuator, based on PZT actuation and ERF control, is feasible and exhibits high performance.
• The integrated design overcomes limitations of conventional actuators.
• This research provides a valuable reference for future high-performance actuator development.