Note: Development of a compact aperture-type XYθz positioning stage

Area of Science:

• Mechanical Engineering
• Nanotechnology
• Biomedical Engineering

Background:

• Precise positioning is crucial for advanced measurement equipment, particularly in biological applications.
• Existing stages may lack the required aperture, compactness, or multi-axis motion for specific biological specimen analysis.

Purpose of the Study:

• To propose and design a new in-plane XYθz nano-positioning stage.
• To optimize the stage for applications requiring an aperture, such as biological specimen measurement.

Main Methods:

• Utilized piezoelectric actuators for motion generation.
• Incorporated bridge-type flexure mechanisms to amplify actuator displacement.
• Performed modeling and design optimization for the stage's performance and dimensions.

Main Results:

• Achieved motion ranges of 300 μm in X and Y directions.
• Obtained a motion range of ±3.9 mrad in the θz direction.
• The stage measures 150 × 150 × 23 mm with a 50 × 50 mm aperture.

Conclusions:

• The developed nano-positioning stage offers precise multi-axis control.
• Its compact size and aperture make it suitable for integration into measurement equipment for biological specimens.