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Updated: Mar 23, 2026

Fabrication And Characterization Of Photonic Crystal Slow Light Waveguides And Cavities
Published on: November 30, 2012
Microstructured Air Cavities as High-Index Contrast Substrates with Strong Diffraction for Light-Emitting Diodes
Yoon-Jong Moon1, Daeyoung Moon2, Jeonghwan Jang2
1Department of Applied Physics, Kyung Hee University , Gyeonggi-do 17104, Republic of Korea.
Cavity engineered substrates (CESs) with high-index-contrast air/alumina patterns significantly boost light-emitting diode (LED) optical power by enhancing light outcoupling. This novel substrate design improves efficiency without compromising electrical performance in LEDs.
Area of Science:
- Optoelectronics
- Materials Science
- Nanotechnology
Background:
- Two-dimensional dielectric gratings enhance light outcoupling in LEDs by overcoming total internal reflection.
- Limited index contrast in conventional patterned media restricts outcoupling efficiency.
Purpose of the Study:
- To develop and investigate cavity engineered substrates (CESs) with high-index-contrast for enhanced light extraction in LEDs.
- To demonstrate the effectiveness of CESs in improving optical power and light extraction efficiency.
Main Methods:
- Fabrication of hexagonally arranged hemispherical air cavities with crystallized alumina shells on GaN substrates.
- Wavelength-resolved diffraction measurements and Fourier analysis to study diffraction modes.
- Fabrication and characterization of InGaN/GaN LEDs on CESs and patterned sapphire substrates.
- Full-vectorial simulations to analyze light extraction efficiency and optical power.
Main Results:
- CESs exhibit strong diffraction and dramatic excitation of low-order diffraction modes due to high-index-contrast air/alumina core/shell patterns.
- LEDs fabricated on CESs showed a ~39% enhancement in optical power compared to state-of-the-art patterned sapphire substrates.
- Simulations confirmed enhanced optical power and showed increasing extraction efficiency with expanded air cavity volume.
- CES LEDs demonstrated a significant beaming effect and improved light extraction via the top escape route.
Conclusions:
- Cavity engineered substrates offer a promising approach to significantly enhance light extraction efficiency in LEDs.
- The high-index-contrast and specific morphology of CESs enable efficient outcoupling of guided modes.
- This technology improves LED performance without negatively impacting essential electrical characteristics.
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