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Updated: Mar 23, 2026

Energy Dispersive X-ray Tomography for 3D Elemental Mapping of Individual Nanoparticles
Published on: July 5, 2016
X-Ray Absorption Correction for Quantitative Scanning Transmission Electron Microscopic Energy-Dispersive X-Ray
Thomas Slater1, Yiqiang Chen1, Gregory Auton2
11School of Materials,University of Manchester,Manchester M13 9PL,UK.
Abstract:
A new method to perform X-ray absorption correction for spherical particles in quantitative energy-dispersive X-ray spectroscopy in the scanning transmission electron microscope is presented. An absorption correction factor is derived and simulated data is presented encompassing a range of X-ray absorption conditions. Theoretical calculations are compared with experimental data of X-ray counts from Au nanoparticles to verify the derived methodology. The effect of detector elevation angle is considered and a comparison with thin-film absorption correction is included.
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