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Updated: Mar 21, 2026
16:11
Implementation of a Reference Interferometer for Nanodetection
Published on: April 26, 2014
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Note: Near infrared interferometric silicon wafer metrology
M S Choi1, H M Park1, K N Joo1
1Department of Photonic Engineering, Chosun University, Gwangju 61452, South Korea.
The Review of Scientific Instruments
|May 2, 2016
Abstract:
In this investigation, two near infrared (NIR) interferometric techniques for silicon wafer metrology are described and verified with experimental results. Based on the transparent characteristic of NIR light to a silicon wafer, the fiber based spectrally resolved interferometry can measure the optical thickness of the wafer and stitching low coherence scanning interferometry can reconstruct entire surfaces of the wafer.
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