Electrothermal MEMS parallel plate rotation for single-imager stereoscopic endoscopes

Area of Science:

• Medical Devices
• Microelectromechanical Systems (MEMS)
• Optical Engineering

Background:

• Stereoscopic endoscopy typically requires dual cameras or complex optical setups.
• Achieving 3D imaging within a compact endoscopic probe presents significant engineering challenges.

Purpose of the Study:

• To develop a novel microelectromechanical system (MEMS) parallel plate-rotation (PPR) device.
• To enable single-imager based stereoscopic 3D endoscopic imaging.
• To miniaturize the components for compatibility with endoscopic probes.

Main Methods:

• Fabrication of an electrothermal MEMS microactuator with bimorph structures (silicon and aluminum layers).
• Integration of the MEMS microactuator with a transparent optical plate for precise rotation.
• Utilizing the rotated optical plate to capture two images for stereoscopic effect.

Main Results:

• The MEMS PPR device achieved precise optical plate rotation up to 37 degrees.
• Generated binocular disparities comparable to conventional stereo cameras with a baseline >100 μm.
• Successfully produced anaglyph 3D images and disparity maps.
• The MEMS PPR device has a compact physical volume of 3.4 mm x 3.3 mm x 1 mm.

Conclusions:

• The developed MEMS PPR device offers a viable solution for compact stereoscopic 3D endoscopic imaging.
• This technology provides a new pathway for miniaturized 3D endoscopic systems.
• The system successfully demonstrates the feasibility of single-imager stereoscopic endoscopy using MEMS technology.