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Angularly-selective transmission imaging in a scanning electron microscope

Jason Holm1, Robert R Keller1

  • 1National Institute of Standards and Technology, Applied Chemicals and Materials Division, 325 Broadway, Boulder, CO 80305, United States.

Ultramicroscopy
|May 15, 2016
PubMed

Keywords:
ApertureCamera lengthHAADFHigh-angle annular dark-fieldSEMSTEM-in-SEMScanning electron microscopyTransmission detectorTransmission scanning electron microscopyt-SEM

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