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Atomically Traceable Nanostructure Fabrication
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Directing Matter: Toward Atomic-Scale 3D Nanofabrication.

Stephen Jesse, Albina Y Borisevich, Jason D Fowlkes1

  • 1Department of Materials Sciences, University of Tennessee , Knoxville, Tennessee 37996, United States.

ACS Nano
|May 17, 2016
PubMed
Summary

Atomically precise manufacturing of 3D structures is crucial for next-gen computing and energy technologies. Focused electron and ion beams offer a promising pathway for controlled 3D atomic manipulation in materials.

Keywords:
atom dynamicsatomic manipulationdirect-writehelium ion microscopynanofabricationnanolithographyscanning electron microscopyscanning transmission electron microscopy

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Area of Science:

  • Materials Science
  • Nanotechnology
  • Atomic Physics

Background:

  • Next-generation computing (memristive, neuromorphic, quantum) and energy storage demand materials engineered at the atomic scale.
  • Current methods primarily focus on 2D structures, limiting 3D atomic control.
  • Achieving precise 3D atomic arrangement and bonding is essential for advanced material properties.

Purpose of the Study:

  • To review recent advancements in atomically precise manufacturing of 3D structures using focused electron and ion beams.
  • To highlight the potential of these methods for creating novel materials and devices.
  • To identify current limitations and future prospects for 3D atomic control.

Main Methods:

  • Focused electron and ion beam techniques for nanoscale fabrication.
  • Simultaneous observation and manipulation of structures at nano- and atomic scales using electron/ion microscopy.
  • Integration of predictive modeling and rapid image analytics for guided control.
  • Review of techniques including radiolysis, liquid precursor fabrication, and epitaxial crystallization.

Main Results:

  • Demonstration of free-standing nanoscale 3D structures creation.
  • Fabrication potential using liquid precursors and atomic layer precision epitaxy.
  • Visualization and control of individual dopant motion within 3D crystal lattices.
  • Establishment of pathways for directing nanoscale architectures.

Conclusions:

  • Focused electron and ion beams provide a viable route to atomically precise 3D manufacturing.
  • Further integration of data analysis, theory, and processing is needed to overcome current constraints.
  • These technologies offer a roadmap towards full 3D atomic control in materials for advanced applications.