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Absolute Position Sensing Based on a Robust Differential Capacitive Sensor with a Grounded Shield Window

Yang Bai1, Yunfeng Lu2,3,4, Pengcheng Hu5

  • 1School of Electrical Engineering and Automation, Harbin Institute of Technology, Harbin 150080, China. baiyang@hit.edu.cn.

Sensors (Basel, Switzerland)
|May 18, 2016
PubMed

Keywords:
capacitive sensorfringe effectlength metrology

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