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Absolute Position Sensing Based on a Robust Differential Capacitive Sensor with a Grounded Shield Window.

Yang Bai1, Yunfeng Lu2,3,4, Pengcheng Hu5

  • 1School of Electrical Engineering and Automation, Harbin Institute of Technology, Harbin 150080, China. baiyang@hit.edu.cn.

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|May 18, 2016
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Summary
This summary is machine-generated.

This study introduces a novel differential capacitive sensor for precise absolute position measurement in length systems. The sensor offers a wide measurement range, excellent linearity, and immunity to vibrations, enhancing measurement accuracy.

Keywords:
capacitive sensorfringe effectlength metrology

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Area of Science:

  • Measurement Science and Instrumentation
  • Sensor Technology
  • Physics

Background:

  • Accurate absolute position measurement is critical for advanced length measuring systems.
  • Existing sensors may face limitations in measurement range, linearity, or susceptibility to external vibrations.
  • Developing robust and high-resolution displacement sensors is an ongoing area of research.

Purpose of the Study:

  • To develop and characterize a simple differential capacitive sensor for absolute position measurement.
  • To investigate the sensor's performance regarding measurement range, linearity, resolution, and sensitivity.
  • To assess the sensor's immunity to multi-directional vibrations.

Main Methods:

  • Design of a differential capacitive sensor incorporating a shield window.
  • Implementation of a novel AC capacitance bridge circuit for direct capacitance measurement.
  • Experimental validation of sensor performance including range, linearity, sensitivity, and resolution.

Main Results:

  • The differential capacitive sensor achieved a measurement range of 6 mm with linearity error below 0.01%.
  • The sensor demonstrated high sensitivity (2 × 10⁻⁴ pF/μm) and a resolution of 0.08 μm.
  • The sensor exhibited immunity to vibrations along two translational degrees of freedom (DOF), while being sensitive to one.

Conclusions:

  • The developed differential capacitive sensor provides a simple yet effective solution for high-accuracy absolute position measurement.
  • The sensor's design offers significant advantages in terms of measurement range, linearity, and vibration immunity.
  • This technology has potential applications in precision engineering and length metrology.