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Wafer-Scale Nanopillars Derived from Block Copolymer Lithography for Surface-Enhanced Raman Spectroscopy.

Tao Li1, Kaiyu Wu1, Tomas Rindzevicius1

  • 1Department of Micro- and Nanotechnology, Technical University of Denmark (DTU) , Anker Engelunds Vej 1, Kongens Lyngby 2800, Denmark.

ACS Applied Materials & Interfaces
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PubMed
Summary

We developed a scalable nanofabrication method using block copolymer lithography for creating highly ordered silicon nanopillars. These nanopillar arrays achieve excellent surface-enhanced Raman spectroscopy (SERS) performance, promising for practical sensing applications.

Keywords:
SERS uniformityblock copolymer lithographynanofabricationplasmonic nanomaterialssurface-enhanced Raman spectroscopy

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Area of Science:

  • Nanotechnology
  • Materials Science
  • Spectroscopy

Background:

  • Developing efficient and scalable nanofabrication techniques is crucial for advanced applications.
  • Surface-enhanced Raman spectroscopy (SERS) requires substrates with highly ordered nanostructures for optimal performance.

Purpose of the Study:

  • To report a novel, facile, and scalable nanofabrication process for creating ordered nanostructures.
  • To demonstrate the utility of these nanostructures as substrates for surface-enhanced Raman spectroscopy (SERS).

Main Methods:

  • Utilized block copolymer lithography with solvent vapor annealing for pattern generation.
  • Employed direct silicon etching templated by block copolymer masks.
  • Introduced an atomic layer deposition (ALD)-assisted method for morphology reversal.

Main Results:

  • Fabricated highly ordered silicon nanopillar arrays with controlled aspect ratios over large areas.
  • Achieved an average SERS enhancement factor exceeding 10^8.
  • Demonstrated excellent SERS uniformity with low relative standard deviations (8.5% across 4 cm, 6.5% over 5x5 mm^2).

Conclusions:

  • The developed nanofabrication process is facile, scalable, and enables direct silicon etching.
  • The resulting silicon nanopillar arrays exhibit high performance for SERS applications.
  • The substrates show significant potential for practical, large-area SERS sensing.