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A MEMS Resonant Sensor to Measure Fluid Density and Viscosity under Flexural and Torsional Vibrating Modes

Libo Zhao1, Yingjie Hu2, Tongdong Wang3

  • 1State Key Laboratory for Manufacturing Systems Engineering, Collaborative Innovation Center of Suzhou Nano Science and Technology, Xi'an Jiaotong University, Xi'an 710049, Shaanxi, China. libozhao@mail.xjtu.edu.cn.

Sensors (Basel, Switzerland)
|June 9, 2016
PubMed

Keywords:
MEMS resonant sensordensity and viscositymeasuring accuracymicrocantilevervibrating mode

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