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SiC protective coating for photovoltaic retinal prosthesis.
Xin Lei1, Sheryl Kane, Stuart Cogan
1Department of Electrical Engineering, Stanford University, Stanford, CA, USA.
Journal of Neural Engineering
|June 22, 2016
Summary
Plasma-enhanced, chemically vapor deposited amorphous silicon carbide (α-SiC:H) coatings effectively protect retinal prostheses. These stable SiC coatings show no degradation in accelerated aging tests, ensuring long-term implant viability.
Area of Science:
- Biomaterials Science
- Materials Science
- Ophthalmology
Background:
- Implantable electronic devices, such as retinal prostheses, require robust protective coatings to ensure long-term functionality and biocompatibility.
- Degradation of coatings can lead to device failure and adverse biological responses.
- Amorphous silicon carbide (α-SiC:H) is a promising material for protective coatings due to its chemical inertness and mechanical properties.
Purpose of the Study:
- To evaluate plasma-enhanced, chemically vapor deposited (PECVD) amorphous silicon carbide (α-SiC:H) as a protective coating for retinal prostheses and other implantable devices.
- To investigate the in vivo failure mechanisms of these coatings.
Main Methods:
- Retinal prostheses coated with α-SiC:H were implanted in rats for up to 1 year.
- Implant degradation was assessed using optical and scanning electron microscopy.
- Accelerated soaking tests at 87 °C in saline were performed to measure dissolution rates of SiC, SiNx, and thermal SiO2.
- Defects in SiC films were analyzed by selectively removing underlying materials.
Main Results:
- SiNx dissolved at 18.3 ± 0.3 nm/d, and thermal SiO2 dissolved at 0.104 ± 0.008 nm/d at 87 °C.
- α-SiC:H films exhibited superior stability, with no quantifiable degradation after 112 days of accelerated testing.
- Defects in thin SiC films were primarily observed over complex topography and rough surfaces.
Conclusions:
- α-SiC:H coatings provide effective protection against erosion, with 112 days of accelerated aging at 87 °C correlating to approximately 10 years in vivo.
- Photovoltaic retinal prostheses with PECVD α-SiC:H coatings demonstrated protection from erosion during a 4-month in vivo follow-up.
- An optimal α-SiC:H layer thickness of approximately 560 nm is recommended for anti-reflective properties and defect coverage.

