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Updated: Mar 18, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
A method of hard X-ray phase-shifting digital holography
So Yeong Park1, Chung Ki Hong1, Jun Lim2
1Department of Physics, POSTECH, 77 Cheongam-Ro, Pohang, Kyoungbuk 37673, South Korea.
Abstract:
A new method of phase-shifting digital holography is demonstrated in the hard X-ray region. An in-line-type phase-shifting holography setup was installed in a 6.80 keV hard X-ray synchrotron beamline. By placing a phase plate consisting of a hole and a band at the focusing point of a Fresnel lens, the relative phase of the reference and objective beams could be successfully shifted for use with a three-step phase-shift algorithm. The system was verified by measuring the shape of a gold test pattern and a silica sphere.
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