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Synchrotron X-ray Microdiffraction and Fluorescence Imaging of Mineral and Rock Samples
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Uncertainties in Small-Angle Measurement Systems Used to Calibrate Angle Artifacts.

Jack A Stone1, Mohamed Amer1, Bryon Faust1

  • 1National Institute of Standards and Technology, Gaithersburg, MD 20899-0001.

Journal of Research of the National Institute of Standards and Technology
|July 2, 2016
PubMed
Summary

We compared autocollimator and Fizeau phase-shifting interferometer measurements for calibrating optical artifacts. Both instruments yielded similar results, suggesting interferometers are a viable alternative for small-angle measurements.

Keywords:
Fizeau interferometerangleautocollimatormetrologyphase shifting

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Area of Science:

  • Metrology
  • Optical Engineering
  • Surface Metrology

Background:

  • Small-angle measurement systems are crucial for calibrating artifacts like optical polygons.
  • Quantifying errors from non-flat artifact surfaces is challenging, impacting orientation interpretation.
  • Existing methods face difficulties in accurately assessing uncertainty in surface orientation measurements.

Purpose of the Study:

  • To investigate and compare error sources in small-angle measurement systems.
  • To evaluate the performance of Fizeau phase-shifting interferometers against autocollimators for artifact calibration.
  • To explore the potential of interferometry as an alternative for precise small-angle measurements.

Main Methods:

  • Comparison of angle measurements using an autocollimator and a Fizeau phase-shifting interferometer.
  • Calibration of optical polygons and analysis of measurement uncertainties.
  • Investigating the impact of imperfect, non-flat artifact faces on measurement accuracy.

Main Results:

  • Autocollimator and interferometer measurements showed no significant differences in results.
  • The Fizeau interferometer provides a clear and robust definition of surface orientation.
  • Quantifying interferometer measurement errors appears more straightforward than autocollimator uncertainties.

Conclusions:

  • Fizeau phase-shifting interferometers offer a promising alternative to autocollimators for small-angle measurements.
  • Interferometry simplifies the quantification of measurement uncertainty, especially with imperfect surfaces.
  • Further research may validate interferometers as a superior tool for precise artifact calibration.