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Capacitive displacement sensor for detecting planar submicrometer motion.

Svetlana Avramov-Zamurovic1, Jae Myung Yoo2, Nicholas G Dagalakis3

  • 1Weapons and System Department United States Naval Academy, 105 Maryland Avenue, Annapolis, Maryland 21402, USA.

The Review of Scientific Instruments
|July 3, 2016
PubMed
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This study presents a simple capacitance-based displacement sensor. The sensor achieves nanometer-level resolution for precise object position measurement.

Area of Science:

  • Electrical Engineering
  • Mechanical Engineering
  • Physics

Background:

  • Capacitive sensing is a common method for non-contact position measurement.
  • Fringing electric fields offer unique opportunities for sensitive displacement detection.

Purpose of the Study:

  • To design and evaluate a simple, low-cost displacement sensor.
  • To investigate the resolution limits of capacitance-based sensing in micro-displacement applications.

Main Methods:

  • Designed a displacement sensor utilizing changes in capacitance.
  • Explored two sensor geometries with small footprints.
  • Fabricated and tested multiple sensor variations.

Main Results:

  • Demonstrated nanometer-level resolution for displacement measurement.

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  • Achieved high resolution at distances of approximately 0.5 μm and 30 μm.

    • Conclusions:

    • The developed capacitance-based sensor offers a simple and effective solution for high-resolution displacement sensing.
    • The sensor's design is suitable for micro-displacement applications requiring precise position monitoring.