Effect of the chamber wall on fluorocarbon-assisted atomic layer etching of SiO₂ using cyclic Ar/C₄F₈ plasma

The authors studied the effect of the temperature and chemical state of the chamber wall on process performance for atomic layer etching of SiO₂ using a steady-state Ar plasma, periodic injection of a defined number of C₄F₈ molecules, and synchronized plasma-based Ar⁺ ion bombardment. To evaluate these effects, the authors measured the quartz coupling window temperature. The plasma gas phase chemistry was characterized using optical emission spectroscopy. It was found that although the thickness of the polymer film deposited in each cycle is constant, the etching behavior changed, which is likely related to a change in the plasma gas phase chemistry. The authors found that the main gas phase changes occur after C₄F₈ injection. The C₄F₈ and the quartz window react and generate SiF and CO. The emission intensity changes with wall surface state and temperature. Therefore, changes in the plasma gas species generation can lead to a shift in etching performance during processing. During initial cycles, minimal etching is observed, while etching gradually increases with cycle number.