Substrate Temperature Effects on Room Temperature Sensing Properties of Nanostructured ZnO Thin Films

Zinc oxide (ZnO) thin films were deposited on glass substrates using chemical spray pyrolysis technique at different substrate temperatures such as 523, 623 and 723 K. X-ray diffraction (XRD) patterns confirmed the formation of polycrystalline films with hexagonal wurtzite crystal structure and revealed the change in preferential orientation of the crystal planes. Scanning electron micrographs showed the formation of uniformly distributed spherical shaped grains at low deposition temperature and pebbles like structure at the higher temperature. Transmittance of 85% was observed for the film deposited at 723 K. The band gap of the films was found to be increased from 3.15 to 3.23 eV with a rise in deposition temperature. The electrical conductivity of the films was found to be improved with an increase in substrate temperature. Surface of ZnO thin films deposited at 523 K, 623 K and 723 K were found to be hydrophobic with the contact angles of 92°, 105° and 128° respectively. The room temperature gas sensing characteristics of all the films were studied and found that the film deposited at 623 K showed a better response towards ammonia vapour.