Jove
Visualize
Contact Us
JoVE
x logofacebook logolinkedin logoyoutube logo
ABOUT JoVE
OverviewLeadershipBlogJoVE Help Center
AUTHORS
Publishing ProcessEditorial BoardScope & PoliciesPeer ReviewFAQSubmit
LIBRARIANS
TestimonialsSubscriptionsAccessResourcesLibrary Advisory BoardFAQ
RESEARCH
JoVE JournalMethods CollectionsJoVE Encyclopedia of ExperimentsArchive
EDUCATION
JoVE CoreJoVE BusinessJoVE Science EducationJoVE Lab ManualFaculty Resource CenterFaculty Site
Terms & Conditions of Use
Privacy Policy
Policies

Related Concept Videos

Uncertainty in Measurement: Accuracy and Precision03:37

Uncertainty in Measurement: Accuracy and Precision

113.3K
Scientists typically make repeated measurements of a quantity to ensure the quality of their findings and to evaluate both the precision and the accuracy of their results. Measurements are said to be precise if they yield very similar results when repeated in the same manner. A measurement is considered accurate if it yields a result that is very close to the true or the accepted value. Precise values agree with each other; accurate values agree with a true value. 
113.3K

You might also read

Related Articles

Articles linked to this work by shared authors, journal, and citation graph.

Sort by
Same author

A Combinatorial Approach to Synthetic Data Generation for Machine Learning.

SN computer science·2026
Same author

Combinatorial Methods in Security Testing.

Computer·2024
Same author

True value and uncertainty in the GUM.

Journal of physics. Conference series·2022
Same author

It Doesn't Have to Be Like This: Cybersecurity Vulnerability Trends.

IT professional·2020
Same author

Finding Bugs in Cryptographic Hash Function Implementations.

IEEE transactions on reliability·2019
Same author

A Study on the Reuse of Plastic Concrete Using Extended Set-Retarding Admixtures.

Journal of research of the National Institute of Standards and Technology·2017

Related Experiment Video

Updated: Mar 17, 2026

Quantitative Detection of Trace Explosive Vapors by Programmed Temperature Desorption Gas Chromatography-Electron Capture Detector
07:57

Quantitative Detection of Trace Explosive Vapors by Programmed Temperature Desorption Gas Chromatography-Electron Capture Detector

Published on: July 25, 2014

20.5K

Repeatability and Reproducibility Standard Deviations in the Measurement of Trace Moisture Generated Using Permeation

Peter H Huang1, Raghu Kacker1

  • 1National Institute of Standards and Technology, Gaithersburg, MD 20899-0001, U.S.A.

Journal of Research of the National Institute of Standards and Technology
|July 15, 2016
PubMed
Summary

This study quantifies the precision of permeation-tube moisture generators used in the semiconductor industry. Results show acceptable repeatability and reproducibility standard deviations for moisture concentration measurements, crucial for industrial calibration.

Keywords:
humidity standardinterlaboratory evaluationsmeasurement uncertaintypermeation-tuberepeatabilityreproducibilitytrace moisture measurement

More Related Videos

Deposition of Porous Sorbents on Fabric Supports
05:58

Deposition of Porous Sorbents on Fabric Supports

Published on: June 12, 2018

7.0K
Production and Testing of Moisture Behavior and Thermal Properties of Rapeseed Straw and Ganoderma resinaceum Mycelium Bio-Composites
09:39

Production and Testing of Moisture Behavior and Thermal Properties of Rapeseed Straw and Ganoderma resinaceum Mycelium Bio-Composites

Published on: September 5, 2025

808

Related Experiment Videos

Last Updated: Mar 17, 2026

Quantitative Detection of Trace Explosive Vapors by Programmed Temperature Desorption Gas Chromatography-Electron Capture Detector
07:57

Quantitative Detection of Trace Explosive Vapors by Programmed Temperature Desorption Gas Chromatography-Electron Capture Detector

Published on: July 25, 2014

20.5K
Deposition of Porous Sorbents on Fabric Supports
05:58

Deposition of Porous Sorbents on Fabric Supports

Published on: June 12, 2018

7.0K
Production and Testing of Moisture Behavior and Thermal Properties of Rapeseed Straw and Ganoderma resinaceum Mycelium Bio-Composites
09:39

Production and Testing of Moisture Behavior and Thermal Properties of Rapeseed Straw and Ganoderma resinaceum Mycelium Bio-Composites

Published on: September 5, 2025

808

Area of Science:

  • Metrology and Measurement Science
  • Chemical Engineering
  • Materials Science

Background:

  • Permeation-tube moisture generators are industry standards for calibrated water vapor and carrier gas mixtures.
  • Accurate moisture concentration measurement is critical in the semiconductor industry.

Purpose of the Study:

  • To quantify the repeatability and reproducibility standard deviations in moisture concentration measurements from permeation-tube generators.
  • To assess the reliability of industrial moisture concentration evaluation methods.

Main Methods:

  • Measurements were performed on three permeation-tube moisture generators used in semiconductor manufacturing.
  • Two independent methods were employed: a calculated value (industrial method) and a measured value using NIST standards and a quartz-crystal-microbalance.
  • Data validation and quantification of standard deviations followed ASTM standard E691-99.

Main Results:

  • Repeatability standard deviation ranged from approximately 1 nL/L to 2 nL/L.
  • Reproducibility standard deviation ranged from approximately 2 nL/L to 8 nL/L.
  • The characteristic used for quantification was the difference between calculated and measured moisture concentrations.

Conclusions:

  • Permeation-tube moisture generators exhibit quantifiable repeatability and reproducibility.
  • The study provides essential data for understanding measurement uncertainty in industrial moisture calibration.
  • Findings support the continued use and refinement of these generators in sensitive industries like semiconductor manufacturing.