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Updated: Jul 30, 2026

A Standard and Reliable Method to Fabricate Two-Dimensional Nanoelectronics
Published on: August 28, 2018
Piezoelectric Electromechanical Coupling in Nanomechanical Resonators with a Two-Dimensional Electron Gas
A A Shevyrin1, A G Pogosov1, A K Bakarov1
1Rzhanov Institute of Semiconductor Physics 13, Lavrentyev Avenue, Novosibirsk 630090, Russia, and Novosibirsk State University 2, Pirogov Street, Novosibirsk 630090, Russia.
Abstract:
The electrical response of a two-dimensional electron gas to vibrations of a nanomechanical cantilever containing it is studied. Vibrations of perpendicularly oriented cantilevers are experimentally shown to oppositely change the conductivity near their bases. This indicates the piezoelectric nature of electromechanical coupling. A physical model is developed, which quantitatively explains the experiment. It shows that the main origin of the conductivity change is a rapid change in the mechanical stress on the boundary between suspended and nonsuspended areas, rather than the stress itself.

