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Updated: Mar 17, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
Divergence-tolerant resonant bandpass filters
Abstract:
Bandpass filters based on subwavelength dielectric gratings are grounded in physical principles that are totally distinct from their thin-film counterparts. Ease in fabrication, design scalability, material sparsity, and on-chip integration compatibility makes them a promising alternative especially for long-wavelength applications. Here we demonstrate the interesting attribute of resonant bandpass filters of high angular stability for fully conical light incidence. Fashioning an experimental bandpass filter with a subwavelength silicon grating on a quartz substrate, we show that fully conical incidence provides an angular full width at half-maximum linewidth of ∼9.5° compared to a linewidth of ∼0.1° for classical incidence. Slow angular variation of the central wavelength with full conical incidence arises via a corresponding slow angular variation of the resonant second diffraction orders driving the pertinent leaky modes. Moreover, full conical incidence maintains a profile with a single passband as opposed to the formation of two passbands characteristic of resonant subwavelength gratings under classical incidence. Our experimental results demonstrate excellent stability in angle, spectral profile, linewidth, and efficiency.
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