Fabrication of a microtoroidal resonator with picometer precise resonant wavelength

Fabricating an optical microresonator with precise resonant wavelength is of significant importance for fundamental research and practical applications. Here, we develop an effective method to fabricate ultra-high Q microtoroid with picometer-precise resonant wavelength. Our method adds a tuning reflow process, using low-power CO₂ laser pulses, to the traditional fabrication process. It can tailor resonant wavelength to a red or blue direction by choosing a proper laser power. Also, this shift can be controlled by the exposure time. Meanwhile, quality factor remains nearly unchanged during this tailoring process. Our method can greatly reduce the difficulties of experiments where precise resonances are required.