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Development of a fluorescence based flux sensor for thin film growth and nanoparticle deposition
Bert De Roo1, Mattias Vervaele1, Markku Rajala2
1Department of Physics and Astronomy, KU Leuven, Celestijnenlaan 200D, BE-3001 Leuven, Belgium.
The Review of Scientific Instruments
|August 1, 2016
Abstract:
An optical flux sensor, based on the fluorescence properties of materials and nanoparticles, has been developed to control the deposition rate in thin film deposition systems. Using a simple diode laser and a photomultiplier tube with a light filter, we report the detection of gallium atoms and CdSe-ZnS quantum dots. This setup has a high sensitivity and reproducibility.
