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Fabrication of Silica Ultra High Quality Factor Microresonators
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Fabrication of Silica Ultra High Quality Factor Microresonators

Published on: July 2, 2012

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Monolithic Cylindrical Fused Silica Resonators with High Q Factors

Yao Pan1, Dongya Wang2, Yanyan Wang3

  • 1College of Optoelectronic Science and Engineering, National University of Defense Technology, Changsha 410073, China. yaomeredithpan@hotmail.com.

Sensors (Basel, Switzerland)
|August 3, 2016
PubMed

Keywords:
Q factorannealingchemical etchingcylindrical resonatorfused silica

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