Development of Multi-Degree-Of-Freedom Piezoelectric Energy Harvester Using Interdigital Shaped Cantilevers

A piezoelectric vibration energy harvester with interdigital shaped cantilever was developed by using silicon bulk micromachining technology. The proposed energy harvester was designed to obtain multi degree-of-freedom (m-DOF). Most of the piezoelectric vibration energy harvesters are comprised of mass-loaded cantilever beams having several resonant frequencies. The second resonant frequency of such a device has lower amplitude compared to its first resonant frequency (fundamental frequency). Therefore, the interdigital shaped cantilever has been proposed for multiple fundamental resonant frequencies. The fabricated piezoelectric vibration energy harvester is composed of main cantilever (MC), sub-main cantilever (SMC), and secondary cantilevers (SC). MC surrounds SMC and SC which have same dimension of 5600 x 800 x 10 μm3. The fabricated piezoelectric energy harvester can generate 51.4 mV(p-p) and 11 mV(p-p) of output voltages at 24.2 Hz and 33 Hz of its resonant frequencies by MC. Moreover, it can generate 8 mV(p-p) and 6.6 mV(p-p) of output voltages at 24.2 Hz and 33.2 Hz of its resonant frequencies by SMC; and 364 mV(p-p) of output voltage at 33.6 Hz of its resonant frequency by SC.