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Passive vibration compensation in scanning white-light interferometry.

Stanislav Tereschenko, Peter Lehmann, Lisa Zellmer

    Applied Optics
    |August 19, 2016
    PubMed
    Summary
    This summary is machine-generated.

    This study introduces a passive vibration compensation method for scanning white-light interferometry (SWLI). It uses a distance measuring interferometer (DMI) to correct for vibrations, significantly improving topography measurement accuracy.

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    Area of Science:

    • Optical Metrology
    • Interferometry
    • Surface Topography Measurement

    Background:

    • Scanning white-light interferometry (SWLI) is susceptible to environmental vibrations and scanner nonlinearities, which distort topography measurements.
    • Accurate surface profiling requires compensation for dynamic changes in the optical path length during measurement.

    Purpose of the Study:

    • To develop and validate a passive vibration compensation approach for SWLI.
    • To improve the accuracy and reliability of topography measurements obtained via SWLI in the presence of disturbances.

    Main Methods:

    • Integration of a pointwise distance measuring interferometer (DMI) with an aerial-measuring Michelson SWLI system.
    • Utilizing DMI to track real-time positional changes of the interferometer relative to the specimen.
    • Implementing a signal reconstruction technique involving frame reordering and enhanced correlogram interpolation.

    Main Results:

    • Successful compensation for unintentional distance changes caused by vibrations and scanner nonlinearities.
    • Reconstruction of accurate topography data from previously unusable, distorted SWLI signals.
    • Achieved measurement accuracy comparable to systems operating without environmental disturbances.

    Conclusions:

    • The proposed passive vibration compensation method effectively mitigates the impact of vibrations on SWLI topography measurements.
    • The enhanced signal reconstruction technique allows for high-accuracy surface profiling even under adverse conditions.
    • Demonstrated practical feasibility through various experimental measurements.