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Using Synchrotron Radiation Microtomography to Investigate Multi-scale Three-dimensional Microelectronic Packages
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Runout error correction in tomographic reconstruction by intensity summation method

Ik Hwan Kwon1, Jun Lim2, Chung Ki Hong1

  • 1Department of Physics, POSTECH, 77 Cheongam-Ro, Nam-Gu, Pohang, Gyeongbuk 37673, Republic of Korea.

Journal of Synchrotron Radiation
|September 1, 2016
PubMed

Keywords:
halo artifactimaging alignmentrunout errortomography

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