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Development of a cascade arc discharge source for an atmosphere-vacuum interface device

S Namba1, T Endo1, S Fujino1

  • 1Graduate School of Engineering, Hiroshima University, 1-4-1 Higashihiroshima, Hiroshima 739-8527, Japan.

The Review of Scientific Instruments
|September 3, 2016
PubMed

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