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Sub-5 nm Patterning by Directed Self-Assembly of Oligo(Dimethylsiloxane) Liquid Crystal Thin Films

Koen Nickmans1, Jeffrey N Murphy1, Bas de Waal2

  • 1Laboratory of Functional Organic Materials and Devices, Department of Chemical Engineering and Chemistry, Eindhoven University of Technology, P.O. Box 513, 5600 MB, Eindhoven, The Netherlands.

Advanced Materials (Deerfield Beach, Fla.)
|October 1, 2016
PubMed

Keywords:
directed self-assemblygraphoepitaxyhigh-χ low-Nliquid crystalsnanolithographynanopatterningoligo(dimethylsiloxane)

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