Related Experiment Video
Updated: Mar 13, 2026

Preparing a Celadonite Electron Source and Estimating Its Brightness
Published on: November 5, 2019
A stand-alone compact EUV microscope based on gas-puff target source
Alfio Torrisi1, Przemyslaw Wachulak1, Łukasz Węgrzyński1
1Institute of Optoelectronics, Military University of Technology, Warsaw, Poland.
Abstract:
We report on a very compact desk-top transmission extreme ultraviolet (EUV) microscope based on a laser-plasma source with a double stream gas-puff target, capable of acquiring magnified images of objects with a spatial (half-pitch) resolution of sub-50 nm. A multilayer ellipsoidal condenser is used to focus and spectrally narrow the radiation from the plasma, producing a quasi-monochromatic EUV radiation (λ = 13.8 nm) illuminating the object, whereas a Fresnel zone plate objective forms the image. Design details, development, characterization and optimization of the EUV source and the microscope are described and discussed. Test object and other samples were imaged to demonstrate superior resolution compared to visible light microscopy.
More Related Videos
Related Concept Videos
Atomic Emission Spectroscopy: Instrumentation
Inductively Coupled Plasma Atomic Emission Spectroscopy: Principle
The ions and electrons produced interact with the fluctuating magnetic field created by a water-cooled...
Overview of Electron Microscopy
Transmission Electron Microscopy
Inductively Coupled Plasma Atomic Emission Spectroscopy: Instrumentation
There are three main types of inductively coupled plasma atomic emission spectroscopy (ICP-AES) instruments: sequential, simultaneous multichannel, and Fourier transform instruments, with the latter being less commonly used....

