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Atomic Resolution Imaging at an Ultralow Accelerating Voltage by a Monochromatic Transmission Electron Microscope
Shigeyuki Morishita1, Masaki Mukai1, Kazu Suenaga2
1JEOL Limited, 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan.
Physical Review Letters
|October 22, 2016
Summary
Achieving atomic resolution in electron microscopy at ultralow voltages (15 kV) is now possible. This study introduces aberration correction techniques to overcome limitations in low-energy electron microscopy for sensitive materials.
Area of Science:
- Materials Science
- Physics
- Electron Microscopy
Background:
- Low-energy electron microscopy offers potential for imaging delicate specimens without damage.
- Geometrical and chromatic aberrations significantly degrade resolution at low voltages.
- Existing techniques struggle to achieve atomic resolution under these conditions.
Purpose of the Study:
- To develop a method for high-resolution imaging at ultralow accelerating voltages.
- To mitigate the effects of geometrical and chromatic aberrations in low-voltage transmission electron microscopy.
Main Methods:
- Implementation of a delta-type aberration corrector.
- Utilizing a monochromator to reduce energy spread to 0.05 eV.
- Counterbalancing residual sixth-order aberrations with other threefold aberrations.
Main Results:
- Demonstrated successful aberration correction at ultralow voltages.
- Achieved atomic resolution imaging of graphene.
- Operated the transmission electron microscope at an accelerating voltage of 15 kV.
Conclusions:
- The developed aberration correction strategy enables atomic resolution at ultralow voltages.
- This advancement opens new possibilities for imaging beam-sensitive materials.
- The technique significantly enhances the utility of low-voltage electron microscopy.
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