Piezoelectric tunable microwave superconducting cavity

In the context of engineered quantum systems, there is a demand for superconducting tunable devices, able to operate with high-quality factors at power levels equivalent to only a few photons. In this work, we developed a 3D microwave re-entrant cavity with such characteristics ready to provide a very fine-tuning of a high-Q resonant mode over a large dynamic range. This system has an electronic tuning mechanism based on a mechanically amplified piezoelectric actuator, which controls the resonator dominant mode frequency by changing the cavity narrow gap by very small displacements. Experiments were conducted at room and dilution refrigerator temperatures showing a large dynamic range up to 4 GHz and 1 GHz, respectively, and were compared to a finite element method model simulated data. At elevated microwave power input, nonlinear thermal effects were observed to destroy the superconductivity of the cavity due to the large electric fields generated in the small gap of the re-entrant cavity.