Large-area, reproducible and sensitive plasmonic MIM substrates for surface-enhanced Raman scattering

Vertically coupled plasmonic structure is of great interest for surface-enhanced Raman scattering (SERS). In this paper, a large-area reproducible SERS substrate is fabricated and demonstrated by a vertically coupled structure composed of Ag triangle arrays on Ag films separated by a nanometric dielectric layer. This metal-insulator-metal (MIM) nanostructure has broadband resonance covering both the laser excitation and Stokes frequencies. Thanks to the convenience of controlling the gap distance by thin dielectric film, the SERS substrate is optimized to yield the best enhancement. The SERS enhancement factor is estimated to be 5.8 × 10⁶ for on-resonant pumping with a 532 nm laser. The uniformity and reproducibility of the SERS substrate are also demonstrated. Our results pave the way for rational design of sensitive SERS substrates and harmless exciting SERS signals.