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Updated: Mar 12, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
Enhanced sensitivity in single-mode silicon nitride stadium resonators at visible wavelengths
Abstract:
The marker-free and noninvasive detection of small traces of analytes in aqueous solution using integrated optical resonators is an emerging technique within bioanalytics. Here, we present a single-mode silicon-nitride stadium resonator operating at the red edge of the visible spectrum, showing sensitivities larger than 200 nm/RIU and transmission dips with extinction ratios of more than 15 dB. We introduce a mathematical model that allows analyzing of the resonator sensitivity using the properties of the guided mode only. Large geometric parameter scans using finite element simulations show that optimal sensing conditions are achieved for TM-polarized modes close to the modal cutoff. Due to its compactness and the short operation wavelength, we anticipate applications of our resonator for integrated bioanalytics.

