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High-Quality-Factor and Low-Temperature-Dependence SMR FBAR Based on BST Using MOD Method.

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    Summary

    This study demonstrates switchable and tunable radio-frequency (RF) thin-film bulk acoustic wave (BAW) resonators using barium strontium titanate (BST). These devices offer controllable RF signal filtering and switching capabilities via applied bias voltage.

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    Area of Science:

    • Materials Science
    • Electrical Engineering
    • Physics

    Background:

    • Ferroelectric materials exhibit tunable dielectric properties under electric fields.
    • Thin-film bulk acoustic wave (BAW) resonators are crucial for radio-frequency (RF) filtering.
    • Integrating tunable dielectrics with BAW devices enables reconfigurable RF functionalities.

    Purpose of the Study:

    • To design, fabricate, and evaluate switchable and tunable thin-film BAW resonators and filters.
    • To utilize the electrostrictive effect of barium strontium titanate (BST) for RF device control.
    • To investigate the performance of BST-based BAW devices under varying DC bias and temperature.

    Main Methods:

    • Fabrication of solidly mounted BAW resonators on high-resistivity silicon.
    • Deposition of 170-nm BST thin film (70/30 Br/Sr composition) using metal-organic deposition.
    • Characterization of RF transmission, switchability, tunability, and temperature dependence.

    Main Results:

    • Resonator exhibited an OFF state (no resonance) at zero bias and an ON state near 5.44 GHz with applied bias.
    • Achieved a quality factor of 746 and a frequency tunability of 1.3% at 5.375 GHz.
    • Measured a temperature coefficient of frequency of -12.595 ppm/°C from room temperature to 80 °C.

    Conclusions:

    • The fabricated BST-based BAW resonators demonstrate effective switchable and tunable RF performance.
    • The electrostrictive effect of BST enables voltage-controlled frequency tuning and signal switching.
    • These devices show potential for reconfigurable RF applications with stable performance over a range of temperatures.