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Updated: Mar 11, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
1Nano Ceramics Center and World Premier International Research Center Initiative (WPI Initiative) for Materials Nanoarchitectonics (MANA), National Institute for Materials Science (NIMS), 1-2-1 Sengen, Tsukuba, Ibaraki, 305-0047, Japan.
Textured silicon nitride (Si3N4) offers superior thermal and mechanical properties. This review details processing methods like hot-working and templated grain growth, and analyzes the resulting anisotropic properties for advanced material applications.
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