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Synthesis and Characterization of High c-axis ZnO Thin Film by Plasma Enhanced Chemical Vapor Deposition System and its UV Photodetector Application
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Fabrication of a ZnO Pyroelectric Sensor.

Chun-Ching Hsiao1, Kuo-Yi Huang2, Yuh-Chung Hu3

  • 1Nano-Electro-Mechanical Systems Research Center, National Taiwan University, Taipei, Taiwan. cchsiao@mail.nems.ntu.edu.tw.

Sensors (Basel, Switzerland)
|November 24, 2016
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Summary

A novel two-step radio frequency sputtering method enhances zinc oxide (ZnO) pyroelectric sensor performance. This process improves voltage responsivity by optimizing ZnO film orientation and incorporating nickel for better energy absorption.

Keywords:
ZnOpyroelectric sensorthin film deposition

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Area of Science:

  • Materials Science
  • Sensor Technology
  • Thin Film Deposition

Background:

  • Pyroelectric sensors are crucial for detecting temperature changes.
  • Zinc oxide (ZnO) is a promising material for pyroelectric applications.
  • Optimizing ZnO thin film properties is key to enhancing sensor performance.

Purpose of the Study:

  • To develop an improved radio frequency (RF) sputtering process for ZnO films.
  • To investigate the impact of a two-step sputtering technique on ZnO pyroelectric sensor performance.
  • To enhance the voltage responsivity of ZnO-based pyroelectric sensors.

Main Methods:

  • A two-step RF sputtering process was employed, starting with lower power followed by higher power.
  • ZnO thin films were deposited using this optimized sputtering technique.
  • A nickel (Ni) film was deposited on uncovered ZnO areas to improve energy absorption.

Main Results:

  • The two-step sputtering process significantly improved the voltage responsivity of the ZnO pyroelectric sensor.
  • This improvement was attributed to the formation of ZnO films with a strong c-axis preferred orientation.
  • Nickel film deposition enhanced voltage responsivity at higher modulating frequencies by increasing incident energy absorption.

Conclusions:

  • The proposed two-step RF sputtering method is effective for fabricating high-performance ZnO pyroelectric films.
  • Optimized film orientation and enhanced energy absorption are critical for superior sensor responsivity.
  • This technique offers a pathway for developing advanced pyroelectric sensing devices.