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Updated: Mar 11, 2026

Tuning Oxide Properties by Oxygen Vacancy Control During Growth and Annealing
Published on: June 9, 2023
Ultrathin Co-O oxide layer-driven perpendicular magnetic anisotropy in a CoO/[Co/Pd]m multilayer matrix upon
Woo Seong Chung1, Seung Mo Yang2, Tae Whan Kim1
1Nano Quantum Electronics Lab, Department of Electronics and Computer Engineering, Hanyang University, Seoul, 133-791, South Korea.
Abstract:
Ferromagnetic/noble metal multilayer (ML) frames are expected to serve as reliable building blocks in a variety of perpendicular magnetic anisotropy (PMA) based spintronic devices. However, ultrathin ML matrices are highly susceptible to unintended reduction of electron spin polarization in the as-grown or annealed states and often require a large repeat number. Here, we introduce a simple approach to achieve thermally stable PMA in ultrathin [Co/Pd]3 MLs involving the incorporation of an ultrathin CoO capping layer. The thickness and oxygen content of the CoO layer are critical parameters to achieve enhanced PMA in ultrathin [Co/Pd]3/CoO MLs post-annealed up to 400 °C. An extensive analysis of structural features identified that robust PMA characteristics in [Co/Pd]3/CoO MLs are linked with thermally activated oxygen atom diffusion leading to structural reconfiguration upon annealing. The possible origin of the enhanced PMA in our [Co/Pd]3/CoO ML samples after high-temperature annealing is discussed, thereby enabling their use in future spintronic-related devices.
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